Advanced Topics
Times & Locations
Start Date | End Date | Days | Time | Location |
---|---|---|---|---|
1/21/2025 | 5/5/2025 | TR | 2:10pm - 3:30pm | KING N345 |
Additional Course Details:
Title: Microelectromechanical Systems (MEMS) and their applications
Description: The objective of this course is to introduce to the students the topics of miniaturized (micro- and nanoscale) systems and devices for various applications in the areas of sensors and actuators. This course will discuss the fundamentals of micro- and nanoscale systems and how they differ from the macroscopic systems. Modeling and design challenges will be discussed from the physics, engineering and the material science perspectives. Topics covered will include semiconductor materials and devices, techniques of microfabrication and photolithography, commercial MEMS devices, microfluidics and lab-on-a-chip systems, biosensors, microactuators, and other related topics.